Description

Galden HT270 is a heat transfer fluid with a boiling point of 270°C. It is a member of the Galden family of dielectric fluids, which have boiling points ranging from 55°C to 270°C.

Galden fluids are inert, high-performance, fluorinated fluids. They have good dielectric properties, exceptional chemical stability, and can operate at very low and elevated temperatures. They are useful in many industrial applications.

Galden HT270 is recommended for use as a heat transfer fluid for etchers, CVD, PVD, and ion implanters. It has a guaranteed shelf life of at least 5 years if stored in the original sealed container at ambient temperatures.

Properties	Typical
Features	Chemical Resistant, High Density, High Heat Resistance
Forms	Liquid
Average Molecular Weight	1550 amu
Density	1.85 g/cm³
Kinematic Viscosity	14.0 cSt
Solubility of air	26.0 ml gas/100 ml liquid
Solubility of water	<10.0 wppm
Surface Tension	20 dyne/cm
Vapor Pressure	<10E-2 torr
Boiling Point	270 °C
Heat of Vaporization – at Boiling Point	15.0 cal/g
Specific Heat Capacity (25°C)	0.23 cal/g/°C
Dielectric Constant	1.94
Dielectric Strength – 2.54mm gap	40 kV
Volume Resistance	6*10E15 ohms·cm
Refractive Index	1.28